Research on micro/nano-electro-mechanical system (MEMS/NEMS) reliability is of crucial
importance, due to the fact that we are facing an era in which MEMS and emerging NEMS …

A method that allows the investigation of discharge transport mechanism in dielectric films
used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is …

Shunt capacitive RF MEMS switches were developed on GaAs substrate, using a III–V
technology process that is fully compatible with standard MMIC fabrication. The switches …

The gate-type carbon nanotubes cathodes exhibit advantages in long-term stable emission
owing to the uniformity of electrical field on the carbon nanotubes, but the gate inevitably …

The present work attempts to provide a different approach to understand the distribution of
injected charge in Si-rich SiN films that find application in MEMS capacitive switches. The …

Residual stress measurements of thin films are common practice in device technology and
are extremely important in particular for the characterization of thin film coatings. A largely …

In this work, a high-density hydrogen (HDH) treatment is proposed to reduce interface traps
and enhance the efficiency of the passivated emitter rear contact (PERC) device. The …

The electrical properties of gold nanorods nanostructured silicon nitride films are
comprehensively investigated with the aid of metal–insulator–metal capacitors and RF …

This review addresses the problem of reaction-diffusion effects and spatiotemporal
oscillations in fiber-like and wire-like systems under the electron beam in SEM and in the …

RF MEMS switches have attracted widespread attention in recent years. Compared to PIN
diodes and FET switches, RF MEMS switches have many advantages including low …