J Mu, M Dijkstra, J Korterik,
H Offerhaus… - Photonics …, 2020 - opg.optica.org
Silicon nitride (Si_3N_4)-on-SiO_2 attracts increasing interest in integrated photonics owing
to its low propagation loss and wide transparency window, extending from∼ 400 nm to 2350 …