J Jiang, Y Yang, W Qiu, D Jiao, X Zhong, Z Liu - Ceramics International, 2023 - Elsevier
A newly designed Al x Cr 95-x (α-Al 2 O 3) 5 (x= 60, 70, and 80 at.%) composite target was
proposed for depositing a corundum-structured Al-rich α-(Al, Cr) 2 O 3 film at low …