Germanium based field-effect transistors: Challenges and opportunities

PS Goley, MK Hudait - Materials, 2014 - mdpi.com
The performance of strained silicon (Si) as the channel material for today's metal-oxide-
semiconductor field-effect transistors may be reaching a plateau. New channel materials …

Nonthermal plasma synthesized freestanding silicon–germanium alloy nanocrystals

XD Pi, U Kortshagen - Nanotechnology, 2009 - iopscience.iop.org
The composition, structure, light emission and oxidation kinetics of Si 1− x Ge x alloy
nanocrystals (∼ 3 nm in diameter) synthesized by nonthermal plasma have been …

Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap

D Degli Esposti, B Paquelet Wuetz, V Fezzi… - Applied physics …, 2022 - pubs.aip.org
ABSTRACT We grow 28Si/SiGe heterostructures by reduced-pressure chemical vapor
deposition and terminate the stack without an epitaxial Si cap but with an amorphous Si-rich …

[图书][B] Strained-Si heterostructure field effect devices

CK Maiti, S Chattopadhyay, LK Bera - 2007 - taylorfrancis.com
A combination of the materials science, manufacturing processes, and pioneering research
and developments of SiGe and strained-Si have offered an unprecedented high level of …

Engineering of dense arrays of Vertical Si1-x Ge x nanostructures

J Müller, A Lecestre, R Demoulin, F Cristiano… - …, 2022 - iopscience.iop.org
Vertical nanostructure technologies are becoming more important for the down scaling of
nanoelectronic devices such as logic transistors or memories. Such devices require dense …

Self-aligned and self-limited quantum dot nanoswitches and methods for making same

PR Berger - US Patent 7,015,497, 2006 - Google Patents
The present invention provides a method for forming quan tum tunneling devices comprising
the steps of:(1) providing a quantum well, the quantum well comprising a composite …

Kinetics and mechanism of low temperature atomic oxygen-assisted oxidation of SiGe layers

C Tetelin, X Wallart, JP Nys, L Vescan… - Journal of Applied …, 1998 - pubs.aip.org
The rates of low temperature atomic oxygen-assisted oxidation of strained epitaxial Si1xGex
(x 0.05, 0.1, and 0.2) layers have been measured and compared with the rate of oxidation of …

Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device

YQ Wang, JH Chen, WJ Yoo, YC Yeo, SJ Kim… - Applied physics …, 2004 - pubs.aip.org
Formation of Ge nanocrystals embedded in HfAlO high-k dielectric by co-sputtering of HfO2,
Al2O3, and Ge, followed by rapid thermal annealing was demonstrated. Analysis by …

A diffusional model for the oxidation behavior of Si1− xGex alloys

SJ Kilpatrick, RJ Jaccodine, PE Thompson - Journal of applied physics, 1997 - pubs.aip.org
Silicon germanium alloys have received considerable attention in recent years for their
potential application in advanced electronic and optoelectronic devices. 1–5 The oxidation …

'Symbiotic'semiconductors: Unusual and counter-intuitive Ge/Si/O interactions

T George, PW Li, KH Chen, KP Peng… - Journal of Physics D …, 2017 - iopscience.iop.org
Since the inception of the first transistors in the 1940s, the immense body of work on the
Group IV semiconductors, Si and Ge, has spearheaded spectacular advances in modern …