Atomic layer deposition of thin films: from a chemistry perspective

J Li, G Chai, X Wang - International Journal of Extreme …, 2023 - iopscience.iop.org
Atomic layer deposition (ALD) has become an indispensable thin-film technology in the
contemporary microelectronics industry. The unique self-limited layer-by-layer growth …

Atomic layer deposition of vanadium oxides: process and application review

VP Prasadam, N Bahlawane, F Mattelaer… - Materials Today …, 2019 - Elsevier
Atomic layer deposition (ALD) is a method of choice for the growth of highly conformal thin
films with accurately controlled thickness on planar and nanostructured surfaces. These …

Atomic layer deposition of vanadium oxide to reduce parasitic absorption and improve stability in n–i–p perovskite solar cells for tandems

JA Raiford, RA Belisle, KA Bush, R Prasanna… - Sustainable Energy & …, 2019 - pubs.rsc.org
Two critical issues associated with semi-transparent, n–i–p perovskite solar cells for 2-
terminal tandem devices are parasitic absorption and long-term instability associated with …

[HTML][HTML] V2O5 thin films for energy storage and conversion

A Mauger, CM Julien - AIMS Materials Science, 2018 - aimspress.com
V 2 O 5 is one of the best material for many applications. Progress is currently made to
improve its performance for use as a sensor, or an electrode, or smart window …

Facile Phase Control of Multivalent Vanadium Oxide Thin Films (V2O5 and VO2) by Atomic Layer Deposition and Postdeposition Annealing

GY Song, C Oh, S Sinha, J Son… - ACS applied materials & …, 2017 - ACS Publications
Atomic layer deposition was adopted to deposit VO x thin films using vanadyl tri-
isopropoxide {VO [O (C3H7)] 3, VTIP} and water (H2O) at 135° C. The self-limiting and purge …

Study of VO2 thin film synthesis by atomic layer deposition

VP Prasadam, B Dey, S Bulou, T Schenk… - Materials Today …, 2019 - Elsevier
Vanadium dioxide emerges as an appealing material for smart thermal management and
electrical/optical switching owing to its abrupt semiconductor-to-metal transition (SMT) at …

Enhanced temperature coefficient of resistance of VOX-based uncooled microbolometers manufactured by plasma enhanced atomic layer deposition

U Kim, D Kim, S Lim, Y Jeon, J Kim, J Lee, J Kim… - Applied Surface …, 2024 - Elsevier
Vanadium oxide (VO X) is a promising material for developing the sensor film of uncooled
microbolometers. However, amorphous VO X film, which is typically formed on the Si …

Thin V 2 O 5 films synthesized by plasma-enhanced atomic layer deposition for memristive applications

IV Antonova, VA Seleznev, NA Nebogatikova… - Physical Chemistry …, 2023 - pubs.rsc.org
In the present study, the V2O5 films synthesized by plasma-enhanced atomic layer
deposition on p-Si and fluorinated graphene on Si (or FG/Si) substrates were analyzed for …

Interdependence of Structure, Morphology, and Phase Transitions in CVD Grown VO2 and V2O3 Nanostructures

D Graf, J Schläfer, S Garbe, A Klein… - Chemistry of …, 2017 - ACS Publications
Phase selective chemical vapor deposition of nanostructured vanadium dioxide (VO2) and
sesquioxide (V2O3) was achieved by deploying [V (OR) 4] n (R= t Bu, n= 1 (1), R= Et, n= 3 …

Switchable 3D Photonic Crystals Based on the Insulator-to-Metal Transition in VO2

J Peng, J Brandt, M Pfeiffer, L G. Maragno… - … applied materials & …, 2024 - ACS Publications
Photonic crystals (PhCs) are optical structures characterized by the spatial modulation of the
dielectric function, which results in the formation of a photonic band gap (PBG) in the …