High performance Microelectromechanical system (MEMS) gyroscopes are in great demand
in the fields of precise navigation, automatic driving and precise attitude measurement …

Purpose The purpose of this paper is to provide an overview of the major reliability issues of
microelectromechanical systems (MEMS) under mechanical and environmental loading …

This article reports a novel method to reduce the electrostatic and capacitive nonlinearities
in a disk resonator gyroscope (DRG) and to further improve its ultimate oscillation amplitude …

This paper proposes a prototype of micro-electromechanical frequency modulation
electrometers based on pre-bias charge mechanism with a single-anchor circular beam …

This paper presents a novel nonlinear error identification and compensation method for the
Hemispherical Resonator Gyro (HRG) from the signal processing perspective. Firstly, the …

Capacitive micromechanical resonators share electrodes with the same bias voltage,
resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the …

The main goal of this study addresses the synchronization between two MEMS resonators
with cubic and quintic mechanical stiffness under the existence of system uncertainties and …

The frequency response of a single crystal silicon resonator under nonlinear vibration is
investigated and related to the shear property of the material. The shear stress-strain relation …

The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk
mode resonator. Reversing nonlinear behaviors (changing from spring softening to …

Hydrogenated amorphous silicon thin-film flexural resonators with sub-micron actuation
gaps are fabricated by surface micromachining on glass substrates. Experimentally, the …