Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

This manuscript illustrates coupled effects of nonlocal elasticity and surface properties on
static and vibration characteristics of piezoelectric nanobeams using thin beam theory. The …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

In this paper, an analytical approach for free vibration analysis of moderately thick
functionally graded rectangular plates coupled with piezoelectric layers is presented. The …

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric
MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals …

In this paper, piezoelectric MEMS (piezo-MEMS) sensors are designed and characterized
for detecting elastic waves released by active flaws, known as acoustic emission (AE). The …

This paper reports on the analysis and removal of transverse spurious modes in shear
horizontal (SH0) mode lithium niobate (LiNbO 3) laterally vibrating resonators (LVRs). A …

Several barriers exist to the development and optimization of high frequency Micro-Electro-
Mechanical (MEMS) resonators, primarily adequate control and understanding of dissipation …

This paper experimentally verifies the impact of thermoelastic damping (TED) in metal
electrodes on the quality factor (Q ted) of 1 GHz Aluminum Nitride (AlN) contour mode …