AlN piezoelectric thin films for energy harvesting and acoustic devices
Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …
properties and applications in energy harvesting devices, ultrasonic transducers …
Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …
and exploited in the past few decades for various applications and for probing fundamental …
Micromachined resonators: A review
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
Thin-film piezoelectric MEMS
CB Eom, S Trolier-McKinstry - Mrs Bulletin, 2012 - cambridge.org
Major challenges have emerged as microelectromechanical systems (MEMS) move to
smaller size and increased integration density, while requiring fast response and large …
smaller size and increased integration density, while requiring fast response and large …
Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
C Zuo, C Yun, CS Lo, J Kim - US Patent 8,816,567, 2014 - Google Patents
CPC....... 2Hell,". 55. 9, Hell" ing a piezoelectric material is disposed between the first con
99.9): O1): E; 9/1 73 26. O1 ductive layer and the second conductive layer. One or more …
99.9): O1): E; 9/1 73 26. O1 ductive layer and the second conductive layer. One or more …
Mode coupling in electromechanical systems: Recent advances and applications
ML Guo, JW Fang, JF Chen, BL Li… - Advanced Electronic …, 2023 - Wiley Online Library
Mode interactions have recently become the focus of intense research in micro/
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …
Doping of aluminum nitride and the impact on thin film piezoelectric and ferroelectric device performance
Recently, the substitutional doping of scandium (Sc) for aluminum (Al) to form aluminum
scandium nitride (AlScN) has been studied to enhance the piezoelectric properties and …
scandium nitride (AlScN) has been studied to enhance the piezoelectric properties and …
Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding
This study examines the alterations in the material properties and the effectiveness of the
nano-polishing process applied to the surface of AlN substrate material through molecular …
nano-polishing process applied to the surface of AlN substrate material through molecular …
Enabling {IoT}{Self-Localization} Using Ambient 5G Signals
This paper presents ISLA, a system that enables low power IoT nodes to self-localize using
ambient 5G signals without any coordination with the base stations. ISLA operates by simply …
ambient 5G signals without any coordination with the base stations. ISLA operates by simply …