MEMS-based tactile sensors: Materials, processes and applications in robotics

IS Bayer - Micromachines, 2022 - mdpi.com
Commonly encountered problems in the manipulation of objects with robotic hands are the
contact force control and the setting of approaching motion. Microelectromechanical systems …

CMOS-based tactile force sensor: A review

SK Yeh, ML Hsieh, W Fang - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
Tactile sensor is an important medium to receive touching information. The rapid
development of the tactile sensor technology was boosted by various application needs and …

Ultrathin tactile sensors with directional sensitivity and a high spatial resolution

N Dvorak, K Chung, K Mueller, PC Ku - Nano Letters, 2021 - ACS Publications
An ultrathin tactile sensor with directional sensitivity and capable of mapping at a high
spatial resolution is proposed and demonstrated. Each sensor node consists of two gallium …

3-axis fully-integrated capacitive tactile sensor with flip-bonded CMOS on LTCC interposer

S Asano, M Muroyama, T Nakayama, Y Hata… - Sensors, 2017 - mdpi.com
This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-
mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide …

Development of wearable sheet-type shear force sensor and measurement system that is insusceptible to temperature and pressure

S Toyama, Y Tanaka, S Shirogane, T Nakamura… - Sensors, 2017 - mdpi.com
A sheet-type shear force sensor and a measurement system for the sensor were developed.
The sensor has an original structure where a liquid electrolyte is filled in a space composed …

Inductive micro tri-axial tactile sensor using a CMOS chip with a coil array

SK Yeh, W Fang - IEEE Electron Device Letters, 2019 - ieeexplore.ieee.org
This letter presents a simple approach to implement the inductive-type micro tri-axial tactile
sensor by integrating a complementary metal-oxide-semiconductor (CMOS) chip with …

MEMS development focusing on collaboration using common facilities: a retrospective view and future directions

M Esashi - Microsystems & Nanoengineering, 2021 - nature.com
I have been developing MEMS (microelectromechanical systems) technology and
supporting the industry through collaboration. A facility was built in house on a 20 mm …

Design and fabrication technology of low profile tactile sensor with digital interface for whole body robot skin

M Makihata, M Muroyama, S Tanaka, T Nakayama… - Sensors, 2018 - mdpi.com
Covering a whole surface of a robot with tiny sensors which can measure local pressure and
transmit the data through a network is an ideal solution to give an artificial skin to robots to …

Sensor technologies for automobiles and robots

Y Nonomura - IEEJ Transactions on Electrical and Electronic …, 2020 - Wiley Online Library
This paper reviews various sensor technologies with application in automobiles and robots.
Several automotive sensors have been developed using the micro‐electromechanical …

Friction-assisted pulling force detection mechanism for tactile sensors

TY Chen, YC Wang, CY Lo… - Journal of …, 2013 - ieeexplore.ieee.org
This paper proposes a novel friction-assisted capacitance tactile sensing mechanism to
simultaneously detect pulling, normal, and shear forces for 3D display image control …