Y Ohno, T Yokoi,
Y Shimizu, J Ren… - … and Technology of …, 2021 - Taylor & Francis
Three-dimensional distribution of arsenic (As) dopants at Σ3 {111}, Σ9 {221}, Σ9 {114}, and
Σ9 {111}/{115} grain boundaries (GBs) in silicon (Si) is examined by correlative analytical …