This contribution reviews experimental and theoretical work on spectroscopy of tungsten
published since the last critical compilation of the energy levels and spectral lines of highly …

The primary requirement for the development of tools for extreme ultraviolet lithography
(EUVL) has been the identification and optimization of suitable sources. These sources must …

An electron-beam ion trap (EBIT) is used to measure extreme ultraviolet spectra between 10
and 25 nm from highly charged ions of tungsten with an open 3 d shell (W xlviii through W …

Dielectronic recombination (DR) of xenonlike W 20+ forming W 19+ has been studied
experimentally at a heavy-ion storage ring. A merged-beams method has been employed for …

A newly developed flat-field extreme ultraviolet (EUV) spectrometer working at 10–130 Å
wavelength range with high spectral resolution and fast-time response has been developed …

Quantitative tungsten study with reliable atomic modeling is important for successful
achievement of ITER and fusion reactors. We have developed tungsten atomic modeling for …

We present high-resolution crystal spectroscopy measurements of the n= 3→ n= 2 L-shell x-
ray transitions of neonlike W 64+, which include seven electric-dipole–allowed transitions …

Abstract The+ W45 and+ W46 3p–4d inner shell excitation lines in addition to+ Mo32 2p–3s
lines have been identified from the spectrum taken by an upgraded high-resolution x-ray …

A series of experiments on tungsten spectroscopy has been carried out in a Large Helical
Device with tungsten pellet injection to study the tungsten spectra. In particular …

Lithography tools are being built and shipped to semiconductor manufacturers for high
volume manufacturing using extreme ultraviolet lithography (EUVL) at a wavelength of 13.5 …