Low temperature (< 700° C) SiO2 and Si-rich SiO2 films: Short review

C Falcony, D Estrada-Wiese, J De Anda… - Journal of Vacuum …, 2023 - pubs.aip.org
SiO2 layers deposited at temperatures (lower than 700 C) have attracted a great deal of
attention for a large variety of applications, since they can be used for dielectric isolation, a …

Broad and nearly white photoluminescence induced by the nitrogen incorporation in Si/SiOxNy multilayers

B Palacios–Márquez, KE González–Flores… - Journal of …, 2021 - Elsevier
This work focuses on the study of the photoluminescent (PL) properties of Si/SiO x N y
multilayer (ML) structures as a function of the thickness of silicon and silicon oxynitride …

Effects of intrinsic defects on the electronic and optical properties of amorphous silica: First principle study

MK Abd-Rahman, SNM Halim, RM Nor… - … Optics, Micro Electro …, 2017 - ieeexplore.ieee.org
The electronic and optical properties of glass are rather sensitive to the variation of its atomic
structure. The effect of intrinsic defects in amorphous structures of silica (a-SiO 2) has shown …