A comprehensive study on RF MEMS switch
This paper emphasis on state-of-the-art of the earlier until the current trend and demand,
principles, design considerations, key performance and fabrication technology of RF MEMS …
principles, design considerations, key performance and fabrication technology of RF MEMS …
Fabrication and characterization of capacitive RF MEMS perforated switch
In this paper, we have designed, simulated, fabricated, and characterized a clamped-
clamped micro mechanical structure-based shunt capacitive RF MEMS switch. The clamped …
clamped micro mechanical structure-based shunt capacitive RF MEMS switch. The clamped …
Mikrosystemtechnik
U Mescheder - Auflage, Teubner, 2004 - Springer
Natiirlich gibt es noch viele andere Bereiche, die schon heute eine Aufnahme in ein
Lehrbuch iiber Mikrosystemtechnik verdient hatten. So sind im Uberlappungsbereich …
Lehrbuch iiber Mikrosystemtechnik verdient hatten. So sind im Uberlappungsbereich …
Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization
LN Thalluri, K Guha, K Srinivasa Rao… - Microsystem …, 2020 - Springer
In this communication, we have designed, simulated, performance improved, fabricated and
characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane …
characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane …
Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit
S Chong, B Lee, KB Parizi, J Provine… - 2011 International …, 2011 - ieeexplore.ieee.org
This paper demonstrates electrical results of an integrated Si CMOS-electrostatically
actuated nanoelectromechanical (NEM) relay circuit. This is an initial step towards realizing …
actuated nanoelectromechanical (NEM) relay circuit. This is an initial step towards realizing …
Epitaxial VO2 thin film-based radio-frequency switches with thermal activation
In this paper, we report on the demonstration of thermally triggered “normally ON”
radiofrequency (RF) switches based on epitaxial vanadium dioxide (VO2) thin films with a …
radiofrequency (RF) switches based on epitaxial vanadium dioxide (VO2) thin films with a …
Integration of nanoelectromechanical relays with silicon nMOS
Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …
Wafer level thin film encapsulation for MEMS
C Gillot, JL Pornin, A Arnaud, E Lagoutte… - 2005 7th Electronic …, 2005 - ieeexplore.ieee.org
Because they have moving parts, or because they need to work in a specific atmosphere
(vacuum, inert gas,...), microelectromechanical systems (MEMS) are not compatible with …
(vacuum, inert gas,...), microelectromechanical systems (MEMS) are not compatible with …
RF MEMS for ubiquitous wireless connectivity. Part I. Fabrication
HJ De Los Santos, G Fischer… - IEEE Microwave …, 2004 - ieeexplore.ieee.org
The aim of this article to expose the impact and status of the application of RF-MEMS
switchable capacitors, varactors and switches in the three elements of this paradigm …
switchable capacitors, varactors and switches in the three elements of this paradigm …
High-performance hybrid complementary logic inverter through monolithic integration of a MEMS switch and an oxide TFT.
A hybrid complementary logic inverter consisting of a microelectromechanical system switch
as a promising alternative for the p-type oxide thin film transistor (TFT) and an n-type oxide …
as a promising alternative for the p-type oxide thin film transistor (TFT) and an n-type oxide …