A Ohata, Y Bae, C Fenouillet-Beranger… - IEEE Electron …, 2012 - ieeexplore.ieee.org
Carrier mobility (μ) at various back-gate biases is studied for nand p-channel ultrathin (8 nm)
SOI MOSFETs with thin (10 nm) buried oxide (BOX) and ground plane (GP). We found that μ …