Nanoelectromechanical systems NEMS are drawing interest from both technical and
scientific communities. These are electromechanical systems, much like …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Ultrasonic ranging has been widely used in automobiles, unmanned aerial vehicles (UAVs),
robots and other fields. With the appearance of micromachined ultrasonic transducers …

This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

An ultrasonic rangefinder has a working range of 30 to 450 mm and operates at a 375-Hz
maximum sampling rate. The random noise increases with distance and equals 1.3 mm at …

This paper studies the application of lateral bulk acoustic thin-film piezoelectric-on-substrate
(TPoS) resonators in high-frequency reference oscillators. Low-motional impedance TPoS …

In its most basic form an oscillator consists of a resonator driven on resonance, through
feedback, to create a periodic signal sustained by a static energy source. The generation of …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …