[HTML][HTML] Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
E Ahvenniemi, AR Akbashev, S Ali… - Journal of Vacuum …, 2017 - pubs.aip.org
Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on
repeated, self-terminating gas–solid reactions, has become the method of choice in …
repeated, self-terminating gas–solid reactions, has become the method of choice in …