This article is a review of the dissipation processes in nanoelectromechanical systems
(NEMS). As NEMS technology becomes more and more prevalent in research and …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

We have employed a chip-bending method to exert continuous and reversible control over
the tensile stress in doubly clamped nanomechanical beam resonators. Tensile stress is …

Understanding and controlling nonlinear coupling between vibrational modes is critical for
the development of advanced nanomechanical devices; it has important implications for …

In this paper, we report the first fully-differential, electrostatically transduced RF MEMS
resonator. The fully-differential electrode configuration not only cancels capacitive …

This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists
of an aluminum nitride (AlN) transducer coupled to a suspended thin silicon carbide (SiC) …

We report a detailed experimental investigation of the adhesive clamping instability in CNT
nanoresonators fabricated on silicon wafers with palladium electrodes and suspended CNT …

Capacitively transduced micromechanical resonators for timing reference applications are
overwhelmingly measured from the current output at their sensing electrodes, using a …

An oscillator employing a polycrystalline 3C silicon carbide (3C-SiC) folded-beam
microelectromechanical resonator as a frequency-setting component with silicon discrete …

Nano-electro-mechanical systems (NEMS), used as sensors for small masses and forces,
have traditionally been operated in the linear regime. While convenient for engineering …