Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at
13.5 nm wavelength for next-generation nanolithography, enabling the continued …

Laser induced breakdown spectroscopy has become an established analytical atomic
emission spectroscopic technique. It has analytical and technical advantages over other …

An experimental study of laser-produced plasmas is performed by irradiating a planar tin
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …

Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

We experimentally investigate the emission of EUV light from a mass-limited laser-produced
plasma over a wide parameter range by varying the diameter of the targeted tin …

Laser produced copper plasmas of different spot sizes in air were investigated using fast
photography and optical emission spectroscopy (OES). The laser energy was 33 mJ. There …

半导体产业是高科技, 信息化时代的支柱. 光刻技术, 作为半导体产业的核心技术之一,
已成为世界各国科研人员的重点研究对象. 本文综述了激光等离子体13.5 nm …

We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the
6.5–6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B 4 C …

We investigated the effect of the excitation wavelength on the density evolution of laser-
produced tin plasmas, both experimentally and numerically. For producing plasmas, Sn …

Experimental scaling relations of the optical depth are presented for the emission spectra of
a tin-droplet-based, 1-μm-laser-produced plasma source of extreme-ultraviolet (EUV) light …