Optical, Optoelectronic, and Third‐Order Nonlinear Photonics of Ultrathin Molybdenum Oxide Film Deposited by Atomic Layer Deposition

MA Basyooni, Y Gundogdu, HS Kilic… - physica status solidi …, 2023 - Wiley Online Library
The atomic layer deposition (ALD) technique has attracted significant attention because it
enables the control of film synthesis at the subnanometre scale. Herein, molybdenum oxide …