Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

[HTML][HTML] Sub-10 nm fabrication: methods and applications

Y Chen, Z Shu, S Zhang, P Zeng, H Liang… - … Journal of Extreme …, 2021 - iopscience.iop.org
Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance
for advancing nanoscience and nanotechnology. While the capability of current …

Additive manufacturing of metal structures at the micrometer scale

L Hirt, A Reiser, R Spolenak, T Zambelli - Advanced Materials, 2017 - Wiley Online Library
Currently, the focus of additive manufacturing (AM) is shifting from simple prototyping to
actual production. One driving factor of this process is the ability of AM to build geometries …

[HTML][HTML] Roadmap for focused ion beam technologies

K Höflich, G Hobler, FI Allen, T Wirtz, G Rius… - Applied Physics …, 2023 - pubs.aip.org
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Focused electron beam induced deposition meets materials science

M Huth, F Porrati, OV Dobrovolskiy - Microelectronic Engineering, 2018 - Elsevier
Focused electron beam induced deposition (FEBID) is a direct-write method for the
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …

Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)

JM De Teresa, A Fernández-Pacheco… - Journal of Physics D …, 2016 - iopscience.iop.org
We review the current status of the use of focused electron beam induced deposition
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …

[HTML][HTML] Towards atomic and close-to-atomic scale manufacturing

F Fang, N Zhang, D Guo, K Ehmann… - … Journal of Extreme …, 2019 - iopscience.iop.org
Human beings have witnessed unprecedented developments since the 1760s using
precision tools and manufacturing methods that have led to ever-increasing precision, from …

[HTML][HTML] Nanoforging Single Layer MoSe2 Through Defect Engineering with Focused Helium Ion Beams

V Iberi, L Liang, AV Ievlev, MG Stanford, MW Lin, X Li… - Scientific reports, 2016 - nature.com
Abstract Development of devices and structures based on the layered 2D materials critically
hinges on the capability to induce, control and tailor the electronic, transport and …

Directing matter: toward atomic-scale 3D nanofabrication

S Jesse, AY Borisevich, JD Fowlkes, AR Lupini… - ACS …, 2016 - ACS Publications
Enabling memristive, neuromorphic, and quantum-based computing as well as efficient
mainstream energy storage and conversion technologies requires the next generation of …

[HTML][HTML] Helium-ion-beam nanofabrication: extreme processes and applications

S He, R Tian, W Wu, WD Li… - International Journal of …, 2020 - iopscience.iop.org
Helium ion beam (HIB) technology plays an important role in the extreme fields of
nanofabrication. This paper reviews the latest developments in HIB technology as well as its …