Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

J Sheng, JH Lee, WH Choi, TH Hong, MJ Kim… - Journal of Vacuum …, 2018 - pubs.aip.org
This article is a review of recent research and development advances in oxide thin film
transistors (TFTs) fabricated by atomic layer deposition (ALD) processes. The ALD process …

Low voltage operation of IGZO thin film transistors enabled by ultrathin Al2O3 gate dielectric

P Ma, L Du, Y Wang, R Jiang, Q Xin, Y Li… - Applied Physics …, 2018 - pubs.aip.org
An ultrathin, 5 nm, Al 2 O 3 film grown by atomic-layer deposition was used as a gate
dielectric for amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors (TFTs). The …

High-Performance Unannealed a-InGaZnO TFT With an Atomic-Layer-Deposited SiO2 Insulator

LL Zheng, Q Ma, YH Wang, WJ Liu… - IEEE Electron …, 2016 - ieeexplore.ieee.org
Amorphous In-Ga-Zn-O (a-IGZO) thin-film transistor with an atomic-layer-deposited (ALD)
SiO 2 gate insulator was fabricated under a maximum processing temperature of 250° C and …

Enhanced stability in Zr-doped ZnO TFTs with minor influence on mobility by atomic layer deposition

J Yang, Y Zhang, C Qin, X Ding… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
We developed a novel method to fabricate Zr-doped ZnO (ZrZnO) thin films via low-
temperature atomic layer deposition technique. ZrZnO films were deposited by diethylzinc …

Nitrogen-doped ZnO film fabricated via rapid low-temperature atomic layer deposition for high-performance ZnON transistors

X Ding, J Yang, C Qin, X Yang, T Ding… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
High-performance nitrogen-doped ZnO (ZnON)-based thin-film transistors (TFTs) were
fabricated by atomic layer deposition (ALD) with a rapid purging time of only 5 s at a …

Solution-Processed High Performance Ytterbium-Doped In2O3 Thin Film Transistor and Its Application in Common-Source Amplifier

Z Wang, T Zhao, J Li, J Zhang - IEEE Transactions on Electron …, 2023 - ieeexplore.ieee.org
In this article, we investigated Ytterbium (Yb)-doped Indium-oxide (In2O3)-based thin-film
transistor (TFT) prepared by the solution-processed. Indium-Yb-oxide (InYbO) films with …

Optimization of Two-Dimensional Channel Thickness in Nanometer-Thick SnO2-Based Top-Gated Thin-Film Transistors Using Electric Field Thermopower …

D Liang, B Chen, B Feng, Y Ikuhara… - ACS Applied Nano …, 2020 - ACS Publications
Transparent amorphous oxide semiconductor (TAOS) based thin-film transistors (TFTs) are
essential as the backplane for developing advanced flat panel displays. Among many …

High-Performance 1-V IGZO Thin-Film Transistors Gated With Aqueous and Organic Electrolyte-Anodized AlxOy

X Lin, Q Xin, J Kim, J Jin, J Zhang… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this work, ultrathin AlxOy films used as gate dielectrics in thin-film transistors (TFTs) are
prepared in aqueous and organic electrolytes using an anodization process. A series of …

Ultra-low-power neurotransmitter sensor using novel “click” chemistry aptamer-functionalized deep subthreshold Schottky barrier IGZO TFT

A Barua, RJ White, KD Leedy, R Jha - MRS Communications, 2021 - Springer
This report implements for the first time an alkyne-azide “click” chemistry to position
dopamine-specific aptamer receptors on InGaZnO (IGZO) thin film transistor (TFT) surfaces …

Interfacial oxidized gate insulators for low-power oxide thin-film transistors

IH Kang, SH Hwang, YJ Baek, SG Kim, YL Han… - ACS …, 2021 - ACS Publications
Low power consumption is essential for wearable and internet-of-things applications. An
effective way of reducing power consumption is to reduce the operation voltage using a very …