P Ma, L Du, Y Wang, R Jiang, Q Xin, Y Li… - Applied Physics …, 2018 - pubs.aip.org
An ultrathin, 5 nm, Al 2 O 3 film grown by atomic-layer deposition was used as a gate
dielectric for amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors (TFTs). The …