On-chip spectrometers with high compactness and portability enable new applications in
scientific research and industrial development. Fourier transform (FT) spectrometers have …

This paper presents the design, modeling, fabrication, and testing of an optical phased array
(OPA) based scanner utilizing microelectromechanical system (MEMS) micromirrors with in …

Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry
process. The device has a large range of motion in X, Y, and Z (14.1 μm in X and Y and 97.9 …

In this paper, we discuss the use of pulse width modulation (PWM) to control analog MEMS
devices. We achieve a precise linear analog control of MEMS by applying PWM signal with …

This paper presents the implementation of a system to capacitively self-sense the position of
a comb drive based MEMS XY nanopositioner from a single common node. The …

A new and improved approach using vertical combs for the differential capacitive sensing of
acceleration using silicon-on-insulator (SOI) wafer technology is presented. The design …

With the rise of the Internet of Things, more and more devices are being connected to the
internet, driving up the demand for wireless connectivity. In addition to advancing the current …

In this study, we research about comb-drive micro-structure, which is a MEMS device used to
measure velocities and accelerations. To ensure the accuracy and visualization of the result …