Micromachined accelerometer with monolithic electrodes and method of making the same
D Yu, F Feng, K Han - US Patent 8,322,216, 2012 - Google Patents
A capacitive accelerometer having one or more micromachined acceleration sensor
assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support …
assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support …
Manufacturing a microfluid mixer
G Natarajan - US Patent 8,585,280, 2013 - Google Patents
A method of manufacturing a microfluid mixer includes pouring a ceramic precursor into a
first mold, a second mold and a third mold. The first mold forms a base plate, the second …
first mold, a second mold and a third mold. The first mold forms a base plate, the second …
Piezoelectric actuator with coplanar electrodes
P Mardilovich, H Karlinski, K Ulmer - US Patent 8,888,255, 2014 - Google Patents
BACKGROUND An inkjet printing device is an example of a fluid ejection device that
provides drop-on-demand ejection of fluid drop lets. A piezoelectric inkjet printer, for …
provides drop-on-demand ejection of fluid drop lets. A piezoelectric inkjet printer, for …
Electrostatic actuator control
RC Gutierrez - US Patent 8,853,975, 2014 - Google Patents
BACKGROUND There are two main types or categories of electrostatic MEMS actuators. A
first type is denoted as gap-closing or parallel-plate MEMS actuators whereas a second type …
first type is denoted as gap-closing or parallel-plate MEMS actuators whereas a second type …
MEMS comprising a movable structural element, and MEMS array
P Duerr, A Neudert - US Patent 12,054,384, 2024 - Google Patents
A MEMS includes a substrate with a substrate extension that rises above a substrate plane.
The MEMS includes a movable structural element, a first spring element that mechanically …
The MEMS includes a movable structural element, a first spring element that mechanically …
Filter apparatus and method
C Rossiter, R Dunning - US Patent 8,063,723, 2011 - Google Patents
US8063723B2 - Filter apparatus and method - Google Patents US8063723B2 - Filter
apparatus and method - Google Patents Filter apparatus and method Download PDF Info …
apparatus and method - Google Patents Filter apparatus and method Download PDF Info …