Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Electrostatically actuated deformable mirrors with four concentric annular electrodes can
exert independent control over defocus as well as primary, secondary, and tertiary spherical …

We present the use of a large stroke deformable membrane mirror for focus control over a
range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is …

Nowadays, big-data centers still rely on hard drives. However, there is strong evidence that
these surface-storage technologies are approaching fundamental limits that may be difficult …

Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus
control and attendant spherical aberration correction for miniaturized imaging systems. The …