EDA performance and clock synchronization over a wireless network: Analysis, experimentation and application to semiconductor manufacturing
Shrinking process tolerances due to decreasing device sizes and increasing chip complexity
in semiconductor manufacturing are motivating efforts to improve methods of equipment …
in semiconductor manufacturing are motivating efforts to improve methods of equipment …
A practical implementation of distributed system control over an asynchronous Ethernet network using time stamped data
DM Anand, JG Fletcher, Y Li-Baboud… - 2010 IEEE …, 2010 - ieeexplore.ieee.org
With the increasing use of Ethernet for real-time control of distributed dynamic systems, and
inexpensive processing power at the sensor and actuator nodes, there is a growing interest …
inexpensive processing power at the sensor and actuator nodes, there is a growing interest …
Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis
YS Li-Baboud, X Zhu, D Anand… - … on Precision Clock …, 2008 - ieeexplore.ieee.org
The ability to acquire quality equipment and process data is important for future real-time
process control systems to maximize opportunities for semiconductor manufacturing yield …
process control systems to maximize opportunities for semiconductor manufacturing yield …
Precise time synchronization in semiconductor manufacturing
V Anandarajah, N Kalappa, R Sangole… - … on Precision Clock …, 2007 - ieeexplore.ieee.org
In today's semiconductor fabrication facilities (" fabs"), coordination of time-based
information throughout the factory and enterprise has become necessary to support fab-wide …
information throughout the factory and enterprise has become necessary to support fab-wide …
Supervisory control and real-time constraints
W Grega - Proceedings of the International Multiconference on …, 2010 - ieeexplore.ieee.org
OPC (OLE for Process Control) protocol was developed as a solution which fulfills
requirements of open data integration architecture for industrial control. OPC standard is not …
requirements of open data integration architecture for industrial control. OPC standard is not …
EES 프레임워크를위한하이브리드생산설비데이터습득시스템(HEDAS) 의설계및구현
김경배 - 한국컴퓨터정보학회논문지, 2012 - kiss.kstudy.com
본 논문은 장비엔지니어링 시스템 (EES) 프레임워크에서 반도체와 광전자 제조장비를 위한
새로운 하이브리드 생산설비데이터 습득 시스템을 설계하고 구현한다. 장비엔지니어링 …
새로운 하이브리드 생산설비데이터 습득 시스템을 설계하고 구현한다. 장비엔지니어링 …
[PDF][PDF] Design and Implementation of a Hybrid Equipment Data Acquisition System (HEDAS) for Equipment Engineering System (EES) Framework
GB Kim - Journal of the Korea Society of Computer and …, 2012 - koreascience.kr
In this paper we design and implement a new Hybrid Equipment Data Acquisition System
(HEDAS) for data collection of semiconductor and optoelectronic manufacturing equipments …
(HEDAS) for data collection of semiconductor and optoelectronic manufacturing equipments …
[PDF][PDF] Project review History
MHS Loop, MNTS Best, CB Inspection - 2009 - erc.engin.umich.edu
Reconfigurable Manufacturing Systems (RMS) ERC – Big Three Quarterly Review Meeting
ERC Big Three Quarterly Review Meeting Page 1 NSF Engineering Research Center (ERC) …
ERC Big Three Quarterly Review Meeting Page 1 NSF Engineering Research Center (ERC) …