Acoustic wave resonators having Fresnel features are dis closed. An example integrated
circuit package includes an acoustic wave resonator, the acoustic wave resonator includ ing …

Bulk acoustic wave (BAW) resonators having convex surfaces, and methods of forming the
same are disclosed. An example BAW resonator includes a first electrode, a piezoelectric …

Circuit structures including a FinFET resonant body tran sistor are disclosed. One circuit
structure includes: a plural ity of fins over a substrate and a plurality of gate structures over …

Unreleased plane acoustic wave (PAW) resonators are disclosed. An example unreleased
PAW resonator includes a substrate, a first acoustic reflector disposed on the substrate, and …

An acoustic resonator includes a wafer and a first phononic crystal disposed on the wafer to
define an acoustic waveguide so as to propagate an acoustic wave along a propagation …

Bulk acoustic wave resonators having a phononic crystal acoustic mirror are disclosed. An
example integrated circuit package includes a bulk acoustic wave (BAW) resonator …

Circuit structures including a FinFET resonant body tran sistor are disclosed. One circuit
structure includes: a plural ity of fins over a substrate and a plurality of gate structures over …

In one example, a method of forming a bulk acoustic wave (BAW) resonator comprises:
forming an electrode on at least one of a semiconductor substrate, a sacrificial layer, or an …

In bulk acoustic wave (BAW) resonators having convex surfaces, an example BAW
resonator includes a first electrode, a piezoelectric layer formed on the first electrode, the …

An example integrated circuit package includes an acoustic wave resonator, the acoustic
wave resonator including a Fresnel surface. In some examples, the Fresnel surface includes …