Gd plasma source modeling at 6.7 nm for future lithography
Plasmas containing gadolinium have been proposed as sources for next generation
lithography at 6. x nm. To determine the optimum plasma conditions, atomic structure …
lithography at 6. x nm. To determine the optimum plasma conditions, atomic structure …
Non-resonant elastic scattering of low-energy photons by atomic sodium confined in quantum plasmas
A Ghosh, D Ray - Physics of Plasmas, 2015 - pubs.aip.org
The non-resonant elastic scattering of low-energy photons by the bound valence electron in
the ground state 3s of atomic sodium confined in quantum plasmas is investigated …
the ground state 3s of atomic sodium confined in quantum plasmas is investigated …
Note: Enhancement of the extreme ultraviolet emission from a potassium plasma by dual laser irradiation
T Higashiguchi, M Yamaguchi, T Otsuka… - Review of Scientific …, 2014 - pubs.aip.org
Emission spectra from multiply charged potassium ions ranging from K 3+ to K 5+ have been
obtained in the extreme ultraviolet (EUV) spectral region. A strong emission feature peaking …
obtained in the extreme ultraviolet (EUV) spectral region. A strong emission feature peaking …
Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmas
Recent progress in the development of CO2 or solid-state lasers facilitates the production of
highly-ionized plasma sources for the generation of extreme ultraviolet (XUV) radiation and …
highly-ionized plasma sources for the generation of extreme ultraviolet (XUV) radiation and …
アルカリ金属プラズマからの波長40nm 極端紫外放射特性
東口武史， 山口麻美， 大塚崇光， 寺内宏満… - … 学術講演会講演予稿集 …, 2011 - jstage.jst.go.jp
30p-B-7 Page 1 アルカリ金属プラズマからの波長 40 nm 極端紫外放射特性 Characteristics of
40-nm EUV emission from an alkali-metal plasma 宇都宮大院工,CORE 1,アイルランド国立大学 …
40-nm EUV emission from an alkali-metal plasma 宇都宮大院工,CORE 1,アイルランド国立大学 …