Kinetics of solid phase crystallization in amorphous silicon

GL Olson, JA Roth - Materials science reports, 1988 - Elsevier
In this review we have examined the crystallization behavior of a-Si over the
temperaturerange from 500° C to∼ 1380° C. We have shown that SPE is a thermally …

Ion-beam-induced epitaxial crystallization and amorphization in silicon

F Priolo, E Rimini - Materials Science Reports, 1990 - Elsevier
The ion-beam-induced epitaxial crystallization (IBIEC) and planar amorphization of
amorphous Si (a-Si) layers onto single-crystal Si substrates is reviewed. In particular, the …

Ion-beam-induced amorphization and recrystallization in silicon

L Pelaz, LA Marqués, J Barbolla - Journal of applied physics, 2004 - pubs.aip.org
Ion-beam-induced amorphization in Si has attracted significant interest since the beginning
of the use of ion implantation for the fabrication of Si devices. A number of theoretical …

Electron‐beam‐induced crystallization of isolated amorphous regions in Si, Ge, GaP, and GaAs

I Jenc̆ic̆, MW Bench, IM Robertson… - Journal of Applied …, 1995 - pubs.aip.org
An energetic electron beam has been used to stimulate crystallization of spatially isolated
amorphous regions in Si, Ge, GaP, and GaAs at 30 and 300 K. In the four materials it was …

A defect model for ion-induced crystallization and amorphization

KA Jackson - Journal of Materials Research, 1988 - cambridge.org
Extensive experimental investigations have been reported on the ion-induced motion of the
interface between the crystalline and amorphous phases of silicon. The crystal grows into …

Mechanism of low-temperature (≤ 300 C) crystallization and amorphization for the amorphous Si layer on the crystalline Si substrate by high-energy heavy-ion beam …

J Nakata - Physical Review B, 1991 - APS
Abstract By high-energy (∼ 2.5-MeV) heavy-ion (75 As+, Kr+ 84, Xe+ 1 3 1, 1 3 2, etc.) beam
irradiation, the amorphous Si layers on the crystalline Si substrates formed by low-energy …

Divacancy control of the balance between ion-beam-induced epitaxial cyrstallization and amorphization in silicon

J Linnros, RG Elliman, WL Brown - Journal of Materials Research, 1988 - cambridge.org
The ion-bombardment-induced reversible movement of a planar amorphous/crystalline
interface in silicon has been studied between 100 and 400° C. The temperature …

Modification of the high fluence irradiation facility at the University of Tokyo: Assessment of radiation-induced amorphization of Zr (Cr, Fe) 2 Laves phase under 180 …

S Kano, H Yang, K Murakami, H Abe - Nuclear Instruments and Methods in …, 2022 - Elsevier
Abstract The High Fluence Irradiation Facility at the University of Tokyo, which had provided
a platform for dual-beam irradiation in Japan, was severely damaged by the 2011 …

Evidence of ionization annealing upon helium-ion irradiation of pre-damaged fluorapatite

S Ouchani, JC Dran, J Chaumont - … Methods in Physics Research Section B …, 1997 - Elsevier
In order to study the behaviour of fluorapatite towards irradiation due to incorporated alpha-
emitters, single crystals of this mineral have been bombarded with 220 keV Pb ions …

Phenomenological description of ion-beam-induced epitaxial crystallization of amorphous silicon

F Priolo, C Spinella, E Rimini - Physical Review B, 1990 - APS
In this paper we report detailed experimental measurements on the dependence of the ion-
beam-induced epitaxial crystallization (IBIEC) of amorphous silicon on dopant …