Influence of particle size distribution on dielectric, electrical, and microstructural properties of aerosol-deposited Ga2O3 film for advanced electronic device

JW Lee, JH Won, DG Choi, JB Jeon, S Kim, C Park… - Ceramics …, 2024 - Elsevier
Abstract Gallium oxide (Ga 2 O 3) films have been the subject of recent scientific and
technological research, owing to their outstanding characteristics. In this study, a rapid and …