There are emerging needs for bilayer lipid membrane (BLM) sensors utilizing the vastly and
highly developed molecular recognition ability of membrane proteins, especially those …

This article details and compares the technology options for post-processing foundry
produced CMOS at chip-scale to enable More than Moore functionality. In many cases there …

The integration of CMOS electronics with MEMS (micro-electro-mechanical systems) is
attractive because it allows MEMS components to be co-located with their associated control …

This work presents a novel die-level post-processing technique for dies including released
movable structures. The procedure was applied to microelectromechanical systems (MEMS) …

Rotation of structures fabricated by planar processing into out-of-plane orientations can be
used to greatly increase the 3-dimensionality of microstructures. Previously this has been …

The quality factor (Q) of integrated inductors is of great importance to radio frequency
applications. Monolithic integration of out-of-plane Au inductors with Complementary Metal …

Recently deep submicron and SiGe (silicongermanium) bipolar CMOS technologies have
enhanced the performance of Si-based radio frequency (RF) integrated circuits up to …

This paper details and compares the technology options for post–processing foundry
produced CMOS at chipscale to enable More than Moore functionality. In many cases there …