A review of data mining applications in semiconductor manufacturing

P Espadinha-Cruz, R Godina, EMG Rodrigues - Processes, 2021 - mdpi.com
For decades, industrial companies have been collecting and storing high amounts of data
with the aim of better controlling and managing their processes. However, this vast amount …

Response surface methodology using observational data: a systematic literature review

MA Hadiyat, BM Sopha, BS Wibowo - Applied Sciences, 2022 - mdpi.com
In the response surface methodology (RSM), the designed experiment helps create
interfactor orthogonality and interpretable response models for the purpose of process and …

A big data analytics architecture for cleaner manufacturing and maintenance processes of complex products

Y Zhang, S Ren, Y Liu, S Si - Journal of cleaner production, 2017 - Elsevier
Cleaner production (CP) is considered as one of the most important means for
manufacturing enterprises to achieve sustainable production and improve their sustainable …

[HTML][HTML] Predictive model-based quality inspection using Machine Learning and Edge Cloud Computing

J Schmitt, J Bönig, T Borggräfe, G Beitinger… - Advanced engineering …, 2020 - Elsevier
The supply of defect-free, high-quality products is an important success factor for the long-
term competitiveness of manufacturing companies. Despite the increasing challenges of …

Data mining in battery production chains towards multi-criterial quality prediction

S Thiede, A Turetskyy, A Kwade, S Kara, C Herrmann - CIRP Annals, 2019 - Elsevier
Battery production has become an increasingly important issue for industry eg due to the
advent of electric cars and the greening of grids. The battery production chain is very …

Fault detection and diagnosis using self-attentive convolutional neural networks for variable-length sensor data in semiconductor manufacturing

E Kim, S Cho, B Lee, M Cho - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
Nowadays, more attention has been placed on cost reductions and yield enhancement in
the semiconductor industry. During the manufacturing process, a considerable amount of …

Bayesian inference for mining semiconductor manufacturing big data for yield enhancement and smart production to empower industry 4.0

M Khakifirooz, CF Chien, YJ Chen - Applied Soft Computing, 2018 - Elsevier
Big data analytics have been employed to extract useful information and derive effective
manufacturing intelligence for yield management in semiconductor manufacturing that is …

Pitfalls and protocols of data science in manufacturing practice

CY Lee, CF Chien - Journal of Intelligent Manufacturing, 2022 - Springer
Driven by ongoing migration for Industry 4.0, the increasing adoption of artificial intelligence,
big data analytics, cloud computing, Internet of Things, and robotics have empowered smart …

Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing

CF Chien, WT Hung, CW Pan… - Computers & Industrial …, 2022 - Elsevier
Virtual metrology (VM) has been employed to improve the performance of advanced process
control for semiconductor manufacturing. A number of VM models have been proposed to …

Wafer map defect pattern classification based on convolutional neural network features and error-correcting output codes

CH Jin, HJ Kim, Y Piao, M Li, M Piao - Journal of Intelligent Manufacturing, 2020 - Springer
Defect clusters on the wafer map can provide important clue to identify the process failures
so that it is important to accurately classify the defect patterns into corresponding pattern …