This paper reviews deposition, integration, and device fabrication of ferroelectric PbZr x Ti 1-
x O 3 (PZT) films for applications in microelectromechanical systems. As examples, a …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

This paper presents the state of the art in scanning force microscopy for dimensional
metrology. A detailed description is given of the important factors affecting the major …

This article summarizes improvements to the speed, simplicity and versatility of tapping
mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric …

In this paper we present an overview of processes for fabrication of piezoelectric thin film
devices using PZT (Pb (Zr x Ti 1− x) O 3) in planar structures. These structures are used in …

This chapter is dedicated to the surface morphology and topography analyses of various
types of polymers in terms of their structural conformations and resulting material structures …

This chapter presents basic principles of operation of an atomic force microscope (AFM) that
outlines the most common imaging modes and describes the acquisition of force distance …

A non-contact atomic force microscope (NC-AFM) based on a microfabricated piezoelectric
cantilever is presented. A single piezoelectric lead zirconate titanate thin film layer on the …

The atomic force microscope (AFM) can provide qualitative information by numerous
imaging modes, but it can also provide quantitative information when calibrated cantilevers …

Microelectromechanical systems (MEMS) are miniaturized devices that when coupled with
IC (integrated circuit) components have the ability to interact with the environment or other …