Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation
In plasma etching for microelectronics fabrication, one of the objectives is to produce a high
aspect ratio (HAR) via and trench structures. A principal contributor to the HAR feature …
aspect ratio (HAR) via and trench structures. A principal contributor to the HAR feature …
[图书][B] Dynamics of Disorder in Silicon Carbide
WC Lowe - 2020 - search.proquest.com
Silicon carbide (SiC) is a ceramic material with desirable thermal and mechanical properties
for use in extreme environments. Due to its resistance to both radiation and corrosion, high …
for use in extreme environments. Due to its resistance to both radiation and corrosion, high …
[HTML][HTML] Exact diagonal representation of normal mode energy, occupation number, and heat current for phonon-dominated thermal transport
A Raj, J Eapen - The Journal of Chemical Physics, 2019 - pubs.aip.org
Collective excitations of crystal vibrations or normal modes are customarily described using
complex normal mode coordinates. While appropriate for calculating phonon dispersion, the …
complex normal mode coordinates. While appropriate for calculating phonon dispersion, the …
[图书][B] Thermal Jamming in Glass Formers
DH Sanders - 2018 - search.proquest.com
Abstract SANDERS, DILLON HUGH. Thermal Jamming in Glass Formers.(Under the
direction of Dr. Jacob Eapen). Theories of the glass transition generally attempt to describe …
direction of Dr. Jacob Eapen). Theories of the glass transition generally attempt to describe …