Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples
A method called'soft thermal printing'(STP) was developed to ensure the optimal transfer of
50 µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the …
50 µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the …
Development of Programmable UV-LED Microlithography System for 3D Microfabrication
SF Shiba, H Jeon, JS Kim, JE Kim… - Journal of …, 2021 - ieeexplore.ieee.org
An advanced UV-LED microlithography system has been introduced for 3D microfabrication.
The system comprises an array of UV-LEDs as a programmable light source, a tilt-rotational …
The system comprises an array of UV-LEDs as a programmable light source, a tilt-rotational …
Conception et réalisation de microsystèmes optiques (MOEMS) en polymère pour l'optique adaptative intégrée sur diodes laser verticales (VCSELs)
S Abada - 2015 - theses.hal.science
Ces travaux de thèse portent sur la conception, la réalisation et d'une nouvelle génération
de MOEMS (Micro-Optical-Electrical-Mechanical System) pour le contrôle actif du faisceau …
de MOEMS (Micro-Optical-Electrical-Mechanical System) pour le contrôle actif du faisceau …