Conventional electrostatic RF-MEMS shunt switches suffer from high actuation voltages,
owing to their membrane-type structures with large spring constant. Alternatively, in this …

This paper presents a low insertion loss capacitive shunt RF-MEMS switch. In the presented
design, float metal concept is utilized to reduce the capacitance in up-state of the device …

This paper reports a novel capacitive RF-MEMS switch. The presented device has frequency
reconfigurable characteristics and thus can be used in multi-band wireless systems. The …

This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, float metal concept is utilized to reduce the RF overlap area between the movable …

Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with
electroplated gold on a proof mass is presented in this paper. The fabricated accelerometer …

A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on the
distributed MEMS transmission line (DMTL) concept towards maximum achievable phase …

This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, float metal concept has been utilized to make the asymmetric structure on either side …

Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters
discusses radio frequency microelectromechanical systems (RF MEMS)-based control …

A comparison of dry and wet release methods for surface micromachining of metallic
structures, such as RF MEMS switches, test structures, bridges, and cantilevers is presented …

This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, switch consists of a beam in the form of two symmetric cantilevers anchored at the …