Atomic layer deposition, mechanical, wear resistance, and optical properties of (Cr1-xAlx) 2O3 films on Si (100)

MS Mehr, L Aarik, T Jõgiaas, A Kasikov, J Kozlova… - Ceramics …, 2024 - Elsevier
This study presents the comparison of microstructure, mechanical, tribological, and optical
properties of the ternary chromium-aluminum oxide films ((Cr 1-x Al x) 2 O 3) with binary Cr 2 …

[HTML][HTML] Impact of deposition temperature on structural and electrical properties of sputtered AlN/Si (111) for CMOS compatible MEMS

S Sandeep, R Jyothilakshmi, IV Shchetinin… - Journal of Alloys and …, 2025 - Elsevier
Aluminium nitride (AlN) thin films are grown by reactive sputtering on Silicon (Si) with (111)
orientation at low temperature (≤ 450° C) for piezoelectric-based micro-electromechanical …

Preparation of bimetallic calcium chromatite nanocomposite using Stevia rebaudiana leaf extract for inducing apoptosis in human cancer cell lines

SF Alanazi, C Sivanandan - Physica Scripta, 2024 - iopscience.iop.org
Despite the widespread industrial use of chromium-based compounds, there are concerns
regarding their toxicity in biomedical applications. Herein, bimetallic calcium chromatite …

Annealing Effect on Structural and Mechanical Properties of Atomic Layer Deposited Cr2O3 Films Doped with Ti and Al

MS Mehr, L Aarik, T Jõgiaas… - 2024 IEEE 14th …, 2024 - ieeexplore.ieee.org
The current study demonstrates the impact of Al and Ti doping of Cr 2 O 3 ultra-thin films
(≦50~nm) on thermal stability and oxidation barrier characteristics that are important …