This book systematically describes the design options for micro systems as well as the
equations needed for calculating the behavior of their basic elements. The fundamental …

The piezoelectric response of AlGaN/GaN circular HEMT pressure sensing device
integrated on AlGaN/GaN diaphragm was experimentally investigated and supported by the …

We present a cost-effective approach to produce silicon strain gauges that can withstand
very high voltage without using any complex package design and without sacrificing any …

Passive stress sensors have been integrated in a silicon interposer test vehicle to
investigate thermo-mechanical stress in a typical 2.5 D system. The present sensors are …

We present a finite element method (FEM) analysis of the AlGaN/GaN diaphragm-based
pressure sensor with integrated C-HEMT. Our concept uses the C-HEMT as a vertical ring …

The mechanical stress detection technique was developed based on light emission
properties of ZnS: Mn particles. The light emission properties of ZnS: Mn particles were …

Els sensors nanomecànics han estat reportats històricament com una eina atractiva per a la
biodetecció degut a la seva alta sensibilitat, alt rendiment i alta integració. La majoria dels …

Die Mechanolumineszenz ist ein weitgehend bekanntes Phänomen. Hierbei werden
Lichtimpulse während der Ausbreitung von Schallwellen in unterschiedlichen Stoffen …