Denoising particle beam micrographs with plug-and-play methods

M Peng, R Kitichotkul, SW Seidel, C Yu… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
In a particle beam microscope, a raster-scanned focused beam of particles interacts with a
sample to generate a secondary electron (SE) signal pixel by pixel. Conventionally formed …

Online beam current estimation in particle beam microscopy

SW Seidel, L Watkins, M Peng… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
In conventional particle beam microscopy, knowledge of the beam current is essential for
accurate micrograph formation and sample milling. This generally necessitates offline …

Continuous-time modeling and analysis of particle beam metrology

A Agarwal, M Peng, VK Goyal - IEEE Journal on Selected Areas …, 2023 - ieeexplore.ieee.org
Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar
values representing noisy measurements of the response from secondary electrons (SEs) …

Addressing neon gas field ion source instability through online beam current estimation

SW Seidel, L Watkins, M Peng, A Agarwal… - Microscopy and …, 2022 - cambridge.org
Focused ion beam microscopes require stable beam current for accurate micrograph
formation and sample milling. In practice, the beam current emitted by a gas field ion source …