On the origin of the metastable β-Ta phase stabilization in tantalum sputtered thin films

JJ Colin, G Abadias, A Michel, C Jaouen - Acta Materialia, 2017 - Elsevier
Despite extensive studies since the 1960s, the exact mechanisms underlying phase
formation of metastable tetragonal beta-Tantalum (β-Ta) structure commonly found in …

[图书][B] Sputtering materials for VLSI and thin film devices

J Sarkar - 2010 - books.google.com
An important resource for students, engineers and researchers working in the area of thin
film deposition using physical vapor deposition (eg sputtering) for semiconductor, liquid …

Nanostructured alpha and beta tantalum formation—Relationship between plasma parameters and microstructure

AA Navid, AM Hodge - Materials Science and Engineering: A, 2012 - Elsevier
Nanostructured tantalum films with an average grain width of 40–50nm were synthesized
using direct current (DC) magnetron sputtering. The relationship between sputtering …

Elastic properties of α-and β-tantalum thin films

G Abadias, JJ Colin, D Tingaud, P Djemia, L Belliard… - Thin Solid Films, 2019 - Elsevier
We comparatively study the elastic properties of the two existing polytypes of tantalum, α-Ta
(ground state bcc structure) and β-Ta (metastable tetragonal structure), using density …

Tribo-corrosion performance of filtered-arc-deposited tantalum coatings on Ti-13Nb-13Zr alloy for bio-implants applications

AC Hee, PJ Martin, A Bendavid, SS Jamali, Y Zhao - Wear, 2018 - Elsevier
Tantalum coatings were deposited on Ti-13Nb-13Zr alloy by filtered cathodic vacuum arc
deposition in order to improve the alloy's wear and corrosion resistance under load-bearing …

A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron …

WC Chen, ZY Wang, CY Yu, BH Liao, MT Lin - Surface and Coatings …, 2022 - Elsevier
In this study, tantalum thin films were deposited on silicon substrates using high power
impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering (pulsed DC) …

The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films

M Grosser, U Schmid - Thin Solid Films, 2009 - Elsevier
In this work, the influence of sputter conditions and film thickness on both the morphology
and the resistivity of tantalum (Ta) thin films will be investigated. Glass wafers were used as …

The impact of structure and temperature on the mechanical properties and radiopacity of Ta-W coatings for tiny endovascular medical implants

S Ravanbakhsh, C Paternoster, P Mengucci… - Materials Chemistry and …, 2023 - Elsevier
The trackability of tiny endovascular medical implants (TEMIs) during and after surgery is a
crucial parameter for their accurate implantation and after surgery follow-ups. In this work …

Effect of sputtering parameters and substrate composition on the structure of tantalum thin films

L Hallmann, P Ulmer - Applied surface science, 2013 - Elsevier
The crystallographic properties of tantalum films deposited as a bioactive coating on Co–Cr–
Mo and Ti–Al–Nb alloys have been investigated. The desired tough and ductile alpha phase …

Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators

K Stella, D Bürstel, S Franzka, O Posth… - Journal of Physics D …, 2009 - iopscience.iop.org
Abstract Large area (A= 6 cm 2), thin tantalum films (5 nm< d< 100 nm) are accomplished by
evaporation from tantalum rods using small pocket e-beam evaporators. Using a sample to …