Materials quest for advanced interconnect metallization in integrated circuits

JH Moon, E Jeong, S Kim, T Kim, E Oh, K Lee… - Advanced …, 2023 - Wiley Online Library
Integrated circuits (ICs) are challenged to deliver historically anticipated performance
improvements while increasing the cost and complexity of the technology with each …

[HTML][HTML] The search for the most conductive metal for narrow interconnect lines

D Gall - Journal of Applied Physics, 2020 - pubs.aip.org
A major challenge for the continued downscaling of integrated circuits is the resistivity
increase of Cu interconnect lines with decreasing dimensions. Alternative metals have the …

Contacts at the Nanoscale and for Nanomaterials

H Wong, J Zhang, J Liu - Nanomaterials, 2024 - mdpi.com
Contact scaling is a major challenge in nano complementary metal–oxide–semiconductor
(CMOS) technology, as the surface roughness, contact size, film thicknesses, and undoped …

[HTML][HTML] Resistivity size effect in epitaxial Ru (0001) layers

E Milosevic, S Kerdsongpanya, A Zangiabadi… - Journal of Applied …, 2018 - pubs.aip.org
Epitaxial Ru (0001) layers are sputter deposited onto Al 2 O 3 (0001) substrates and their
resistivity ρ measured both in situ and ex situ as a function of thickness d= 5–80 nm in order …

The anisotropic size effect of the electrical resistivity of metal thin films: Tungsten

P Zheng, D Gall - Journal of Applied Physics, 2017 - pubs.aip.org
The resistivity of nanoscale metallic conductors is orientation dependent, even if the bulk
resistivity is isotropic and electron scattering cross-sections are independent of momentum …

Resistivity scaling due to electron surface scattering in thin metal layers

T Zhou, D Gall - Physical Review B, 2018 - APS
The effect of electron surface scattering on the thickness-dependent electrical resistivity ρ of
thin metal layers is investigated using nonequilibrium Green's function density functional …

[HTML][HTML] Monolithic two-color short-wavelength InGaAs infrared photodetectors using InAsP metamorphic buffers

S Park, J Jeon, VM More, RS Lee, Y Seo, M Kim… - Applied Surface …, 2022 - Elsevier
A bias-selectable two-color heterojunction bandgap engineered InGaAs thin film infrared
photodetector, monolithically grown on an InP substrate by metal–organic chemical vapor …

Anisotropic resistivity size effect in epitaxial Mo (001) and Mo (011) layers

A Jog, P Zheng, T Zhou, D Gall - Nanomaterials, 2023 - mdpi.com
Mo (001) and Mo (011) layers with thickness d= 4–400 nm are sputter-deposited onto MgO
(001) and α-Al2O3 (11 2¯ 0) substrates and their resistivity is measured in situ and ex situ at …

[HTML][HTML] Resistivity size effect in epitaxial iridium layers

A Jog, D Gall - Journal of Applied Physics, 2021 - pubs.aip.org
The resistivity size effect in Ir is quantified with in situ and ex situ transport measurements at
295 and 77 K using epitaxial layers with thickness d= 5–140 nm deposited on MgO (001) …

[HTML][HTML] First-principles prediction of electron grain boundary scattering in fcc metals

T Zhou, A Jog, D Gall - Applied Physics Letters, 2022 - pubs.aip.org
The electron reflection probability r at symmetric twin boundaries Σ3, Σ5, Σ9, and Σ11 is
predicted from first principles for the eight most conductive face-centered cubic (fcc) metals. r …