Non-equilibrium in low-temperature plasmas

F Taccogna, G Dilecce - The European Physical Journal D, 2016 - Springer
The wide range of applications of cold plasmas originates from their special characteristic of
being a physical system out of thermodynamic equilibrium. This property enhances its …

Electron dynamics in low pressure capacitively coupled radio frequency discharges

S Wilczek, J Schulze, RP Brinkmann, Z Donkó… - Journal of Applied …, 2020 - pubs.aip.org
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

Towards universal plasma-enabled platform for the advanced nanofabrication: Plasma physics level approach

O Baranov, S Xu, K Ostrikov, BB Wang… - Reviews of Modern …, 2018 - Springer
Growing demand for efficient, high-resolution surface processing has led to the emergence
of a rich variety of plasma-based technologies underpinned by an equally wide range of …

Foundations of capacitive and inductive radio-frequency discharges

P Chabert, TV Tsankov… - Plasma Sources Science …, 2021 - iopscience.iop.org
This paper is the first from a set of two companion papers on radio-frequency (RF)
discharges. These two papers are in turn part of a larger series on the foundations of plasma …

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

J Schulze, Z Donko, T Lafleur, S Wilczek… - Plasma Sources …, 2018 - iopscience.iop.org
Power absorption by electrons from the space-and time-dependent electric field represents
the basic sustaining mechanism of all radio-frequency driven plasmas. This complex …

The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

B Horváth, M Daksha, I Korolov, A Derzsi… - … Sources Science and …, 2017 - iopscience.iop.org
The effects of electron induced secondary electron (SE) emission from SiO 2 electrodes in
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …

Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields

S Patil, S Sharma, S Sengupta, A Sen… - Physical Review …, 2022 - APS
We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …

Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas

S Wilczek, J Trieschmann, D Eremin… - Physics of …, 2016 - pubs.aip.org
Low pressure capacitive radio frequency (RF) plasmas are often described by equivalent
circuit models based on fluid approaches that predict the self-excitation of resonances, eg …

Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

H Sun, S Banerjee, S Sharma, AT Powis… - Physics of …, 2023 - pubs.aip.org
Achieving large-scale kinetic modeling is a crucial task for the development and optimization
of modern plasma devices. With the trend of decreasing pressure in applications, such as …

Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms

S Sharma, N Sirse, A Kuley… - Journal of Physics D …, 2022 - iopscience.iop.org
Using a particle-in-cell simulation technique, we investigate the plasma and ionization
asymmetry, higher harmonics generation, and electron and ion energy distribution function …