The majority of the industrial material handling mechanisms used in the manipulation or
assembly of mesoscale objects are slow and require precision programming and tooling …

The dominance of conduction and the negligible effect of gravity, and hence free convection,
are verified in the case of microscale heat sources surrounded by air at atmospheric …

Purpose In this paper, it is presented system identification and design of robust force
controllers for an electrostatic microgripper grabbing a microparticle. Methods Firstly, it is …

This paper presents the design and development of a novel tool, called the micro-clasp
gripper, for accomplishing firm and stable gripping and manipulation of complex-shaped …

Thermal actuators are extensively used in microelectromechanical systems (MEMS). Heat
transfer through and around these microstructures are very complex. Knowing and …

The design of many thermal Microelectromechanical (MEMS) actuators is often based on
finite element analysis, but lacks analytical insight. In this paper we report a novel electro …

This chapter presents a systematic approach to address high‐yield aspects of compliant
microelectromechanical systems (MEMS) assembly. The methodology includes snap …

An active joining mechanism for the construction of microstructures, comprising detethered
microparts and locking actuators fabricated on a wafer, has been implemented. An active …

Micro-Electro-Mechanical Systems (MEMS) technology offers the opportunity to produce
mechanical, electromechanical, and electrochemical devices with the same unprecedented …

Bent and folded beam configurations have been popularly used in electrothermoelastic (ET)
actuation. This paper introduces new designs of thermal end-effector with micro-grasping …