Silicon is one of the main components of commercial solar cells and is used in many other
solar‐light‐harvesting devices. The overall efficiency of these devices can be increased by …

Silicon is an attractive semiconductor material for wide‐ranging applications, from
electronics and sensing to solar cells. Functionalization of H‐terminated silicon surfaces with …

Molecular monolayer doping (MLD) presents an alternative to achieve doping of silicon in a
nondestructive way and holds potential for realizing ultrashallow junctions and doping of …

All electronic, optoelectronic or photovoltaic applications of silicon depend on controlling
majority charge carriers via doping with impurity atoms. Nanoscale silicon is omnipresent in …

An effective bottom-up technology for precisely controlling the amount of dopant atoms
tethered on silicon substrates is presented. Polystyrene and poly (methyl methacrylate) …

Contact doping method for the controlled surface doping of silicon wafers and nanometer
scale structures is presented. The method, monolayer contact doping (MLCD), utilizes the …

This article describes for the first time the controlled monolayer doping (MLD) of bulk and
nanostructured crystalline silicon with As at concentrations approaching 2× 1020 atoms cm …

Ex-situ doping of 30 nm thick silicon-on-insulator (SOI) substrates is performed by using
polymers terminated with a doping containing moiety. Poly (methylmetachrylate) polymers …

The field of chemical functionalization of semiconductor surfaces has developed
tremendously over the last several decades. Since silicon occupied the main portion of the …

In this perspectives paper we will explore the doping state-of-the-art as it evolves for 3D to
2D structures and materials, and the following impact on the metrology methods needed to …