Interconnect structure for integrated circuits

JJ Liaw - US Patent 8,405,216, 2013 - Google Patents
The present invention discloses an interconnect structure for an integrated circuit formed on
a semiconductor substrate. In one embodiment, the first conductive layer is formed above …

Semiconductor device and method of manufacturing the same

E Hayashi, K Go, K Harada, S Baba - US Patent 7,791,204, 2010 - Google Patents
Even when a stiffener is omitted, the semiconductor device which can prevent the
generation of twist and distortion of a wiring Substrate is obtained. As for a semiconductor …

Semiconductor device

S Wakiyama, S Baba - US Patent App. 11/157,863, 2006 - Google Patents
Therefore, the present invention provides a semi conductor device improved So as to
SuppreSS the occurrence of delamination, cracking or the like even when mounting a …

Method of forming crack trapping and arrest in thin film structures

TM Shaw, MW Lane, XH Liu, G Bonilla… - US Patent …, 2009 - Google Patents
Current trends in microchip fabrication are employing lower dielectric constant (k) materials
in BEOL (back end of the line) processing. Preferably, ultra-low-k materials are employed as …

Semiconductor device and method of manufacturing the same

E Hayashi, K Go, K Harada, S Baba - US Patent 8,314,495, 2012 - Google Patents
US8314495B2 - Semiconductor device and method of manufacturing the same - Google
Patents US8314495B2 - Semiconductor device and method of manufacturing the same …

Wiring substrate and semiconductor device using the same

M Miura, K Kato, H Ikebe - US Patent App. 11/211,712, 2006 - Google Patents
0004 2. Description of the Related Art 0005 Recently, in a package substrate of a
semiconduc tor device, it is required to provide a wiring having higher density. To Satisfy …

Circuit structures and methods with BEOL layer (s) configured to block electromagnetic interference

DI Kim, J Kim, MJ Kim, C Cho - US Patent 7,821,110, 2010 - Google Patents
Back end of line (BEOL) circuit structures and methods are provided for blocking externally-
originating or internally-originating electromagnetic interference. One such BEOL circuit …

Tall trenches for via chamferless and self forming barrier

Y Mignot, CC Yang, H Shobha - US Patent 11,101,175, 2021 - Google Patents
Chamferless via structures and methods of manufacture are provided. The structures include
a conductive line and a set of chamferless wiring vias formed in a dielectric material with at …

Semiconductor memory device

C Seongmin, K Hyukwoo, KIM Jangseop - US Patent 10,998,318, 2021 - Google Patents
A semiconductor memory device includes lower electrodes, each of the lower electrodes
surrounding an inner space, an upper support layer on top surfaces of the lower electrodes …

Semiconductor device and method of manufacturing the same

E Hayashi, K Go, K Harada, S Baba - US Patent 8,018,066, 2011 - Google Patents
Even when a stiffener is omitted, the semiconductor device which can prevent the
generation of twist and distortion of a wiring Substrate is obtained. As for a semiconductor …