Structuring and functionalization of non-metallic materials using direct laser interference patterning: a review

L Mulko, M Soldera, AF Lasagni - Nanophotonics, 2022 - degruyter.com
Direct laser interference patterning (DLIP) is a laser-based surface structuring method that
stands out for its high throughput, flexibility and resolution for laboratory and industrial …

Systems and methods for creating crystallographic-orientation controlled poly-silicon films

JS Im, PC van der Wilt - US Patent 7,645,337, 2010 - Google Patents
In accordance with one aspect, the present invention provides a method for providing
polycrystalline films having a con trolled microstructure as well as a crystallographic texture …

Systems and methods for processing thin films

J Im - US Patent 7,364,952, 2008 - Google Patents
The present disclosure is directed to methods and systems for processing a thin film
samples. In an exemplary method, semiconductor thin films are loaded onto two different …

Line scan sequential lateral solidification of thin films

JS Im - US Patent 8,221,544, 2012 - Google Patents
(22) Filed: Dec. 2, 2005 A polycrystalline film is prepared by (a) providing a substrate having
a thin film disposed thereon, said film capable of (65) Prior Publication Data laser-induced …

Systems and methods for inducing crystallization of thin films using multiple optical paths

J Im - US Patent 7,318,866, 2008 - Google Patents
The present invention is directed to systems and methods for irradiating regions of a thin film
sample (s) with laser beam pulses having different energy beam characteristics that are …

Systems and methods for preparing epitaxially textured polycrystalline films

JS Im - US Patent 8,012,861, 2011 - Google Patents
The disclosed Subject matter relates to systems and methods for preparing epitaxially
textured polycrystalline films. In one or more embodiments, the method for making a textured …

Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions

JS Im - US Patent 7,622,370, 2009 - Google Patents
(57) ABSTRACT A process and system for processing a thin film sample are provided. In
particular, a beam generator can be controlled to emit at least one beam pulse. The beam …

Single scan irradiation for crystallization of thin films

JS Im, PC Van Der Wilt - US Patent 7,311,778, 2007 - Google Patents
(57) ABSTRACT A method of processing a polycrystalline film on a substrate includes
generating a plurality of laser beam pulses, posi tioning the film on a Support capable of …

Systems and methods for creating crystallographic-orientation controlled poly-silicon films

JS Im - US Patent 8,734,584, 2014 - Google Patents
In accordance with one aspect, the present invention provides a method for providing
polycrystalline films having a con trolled microstructure as well as a crystallographic texture …

Systems and methods for inducing crystallization of thin films using multiple optical paths

JS Im - US Patent 8,034,698, 2011 - Google Patents
The present invention is directed to systems and methods for irradiating regions of a thin film
sample (s) with laser beam pulses having different energy beam characteristics that are …