MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

HT Le, RI Haque, Z Ouyang, SW Lee, SI Fried… - Microsystems & …, 2021 - nature.com
MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

Powering internet-of-things from ambient energy: a review

A Chatterjee, CN Lobato, H Zhang… - Journal of Physics …, 2023 - iopscience.iop.org
Abstract Internet-of-thing (IoT) is an assembly of devices that collect and share data with
other devices and communicate via the internet. This massive network of devices, generates …

Magnetic property regulation and mechanism analysis of FeSiBC soft magnetic composites by mixing with FeSiCr or carbonyl iron powder

Z Zhu, P Wang, J Liu, P Lan, J Pang, J Zhang - Journal of Magnetism and …, 2023 - Elsevier
FeSiBC, FeSiCr, and CIP (carbonyl iron powder) are the main raw materials for the
preparation of molding choke. In this study, water atomized FeSiCr powder with three …

A novel PCB-embedded coupled inductor structure for a 20-MHz integrated voltage regulator

F Zhu, Q Li - IEEE Journal of Emerging and Selected Topics in …, 2022 - ieeexplore.ieee.org
As power demands of processors in portable electronics continuously grow, the voltage
regulator (VR) for the processor is expected to be efficient and miniaturized. Compared with …

Direct-write printed broadband inductors

Y Gu, D Park, S Gonya, J Jendrisak, S Das… - Additive …, 2019 - Elsevier
The capability to additively manufacture fully-functioning electronic circuits is a frontier in 3D-
printed electronics that will afford unprecedented scalability, miniaturization, and …

Integrated MEMS toroidal transformer with Ni-Zn ferrite core for power supply on chip

H Li, K Zhu, K Lei, T Xu, H Wu - IEEE Transactions on Power …, 2022 - ieeexplore.ieee.org
A miniature integrable transformer is an obstacle to the miniaturization of packaged power
supply on chip (PwrSoC). This letter introduces a through-silicon via (TSV) high-aspect-ratio …

Microfabricated air-core toroidal inductor in very high-frequency power converters

HT Le, Y Nour, A Han, F Jensen… - IEEE Journal of …, 2018 - ieeexplore.ieee.org
Miniaturization of power supplies is required for future intelligent electronic systems, eg,
Internet-of-Things devices. Inductors play an essential role, and they are by far the most …

A micro-inductor with thin film magnetic core for a 20 MHz buck converter

S Peng, J Yu, C Feeney, T Ye, Z Zhang… - Journal of Magnetism and …, 2021 - Elsevier
A micro-inductor has been fabricated on silicon substrate using a Micro-Electromechanical
Systems (MEMS) process. The micro-inductor has a single layer copper winding …

Area-efficient extended 3-D inductor based on TSV technology for RF applications

C Qu, Z Zhu, Y En, L Wang, X Liu - IEEE Transactions on Very …, 2020 - ieeexplore.ieee.org
An extended model of through-silicon via (TSV)-based solenoid inductor is proposed to save
on-chip areas for 3-D radio frequency (RF) ICs and package integration. To achieve a high …

Magnetic core solenoid power inductors on organic substrate for system-in-package integrated high-frequency voltage regulators

MLF Bellaredj, AK Davis, P Kohl… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
In this paper, the design, modeling, fabrication, and characterization of System-in-Package
(SiP) solenoid power inductor using a NiZn ferrite composite magnetic core material is …