A micro hot wire anemometer sensor has been constructed. The process consists in
depositing a thin doped polycrystalline silicon layer on silicon substrate, using a micro …

The failure behavior of MEMS can be regarded as the result of certain dependent failure
mechanisms in accordance with device's internal attributes and external environment …

This paper describes a failure analysis on a commercial MEMS microphone after a test
according to the standard of Mil-Std-883. With the help of test and a finite element …

This dissertation proposes a novel accumulative test method for MEMS-based, commercial
off-the-shelves inertial measure units (IMUs) from the automotive field. The need for …

MEMS technology has become the hotspot of fuze development currently, but the reliability
problems seriously influence the application of MEMS in fuze. By way of analyzing the …

Microelectromechanical System (MEMS) sensors are an essential branch of the
microelectronic industry. They have been ubiquitously used in all live domains and …

Micro electromechanical systems (MEMS) and microsystems technologies are seeing
increased consideration for use in military applications. Assets ranging from aircraft and …

As the Army transforms into a more lethal, lighter and agile force, the technologies that
support these systems must decrease in size while increasing in intelligence. Micro …

It can be said that the semiconductor is based on three elements: the transistor, the capacitor
and the wire. There is not a standard set of structures in the MEMS world; this is a very …

Micro-electromechanical systems (MEMS) and microsystems technologies are being
increasingly considered for use in military vehicles and weapon systems. Assets ranging …