A substrate holder for a lithographic apparatus has a planarization layer provided on a
surface thereof. The planarization layer provides a smooth surface for the formation of a thin …

(57) ABSTRACT A thin film deposition apparatus that is suitable for produc tion of large-
sized substrates with fine patterns includes: an electrostatic chuck including a body that …

A lithographic apparatus includes a projection system, a substrate table, a plurality of
sensors, an actuator and a controller. The projection system is configured to project a …

(57) ABSTRACT A substrate holder for a lithographic apparatus has a main body having a
thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or …

An optical assembly includes: an optical element, which is transmissive or reflective to
radiation at a used wavelength and has an optically used region; and a thermally conductive …

(57) ABSTRACT A substrate holder for a lithographic apparatus has a main body having a
thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or …

An object holder for a lithographic apparatus has a main body having a surface. A plurality of
burls to support an object is formed on the surface or in apertures of a thin-film stack. At least …

A transducer apparatus comprises a package substrate and a transducer disposed over a
die substrate. The die substrate is disposed over the package substrate. The transducer …

An object holder for a lithographic apparatus has a main body having a surface. A plurality of
burls to support an object is formed on the surface or in apertures of a thin-film stack. At least …

The present invention provides a method for containing unwanted electric charge that
accumulates on the surface of the dielectric of an electrostatic clamp. One source of such …