Frequency shifts of micro and nano cantilever beam resonators due to added masses

A Bouchaala, AH Nayfeh… - Journal of …, 2016 - asmedigitalcollection.asme.org
We present analytical and numerical techniques to accurately calculate the shifts in the
natural frequencies of electrically actuated micro and nano (carbon nanotubes (CNTs)) …

Design and analysis of MEMS based piezoresistive pressure sensor for sensitivity enhancement

A Nallathambi, T Shanmuganantham… - Materials Today …, 2018 - Elsevier
This paper reported novel high sensitivity and linear 0-1MPa piezoresistive pressure sensor
for environmental applications. The proposed work as two different structures of membrane …

Analytical study of the frequency shifts of micro and nano clamped–clamped beam resonators due to an added mass

A Bouchaala, AH Nayfeh, MI Younis - Meccanica, 2017 - Springer
We present analytical formulations to calculate the induced resonance frequency shifts of
electrically actuated clamped–clamped micro and nano (Carbon nanotube) beams due to …

[PDF][PDF] Design of diaphragm based MEMS pressure sensor with sensitivity analysis for environmental applications

A Nallathambi, T Shanmuganantham - Sensors & transducers, 2015 - sensorsportal.com
In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor
for environmental applications is discussed. The main focus of this paper is to design …

Dimension and doping concentration based noise and performance optimization of a piezoresistive MEMS pressure sensor

KJ Suja, GS Kumar, A Nisanth, R Komaragiri - Microsystem Technologies, 2015 - Springer
Micro electro mechanical system are highly miniaturized devices combining both electrical
and mechanical components that are fabricated using integrated circuit batch processing …

Design & analysis of diaphragm for MEMS based pressure sensors

VC Thakar, BN Patel, PK Karsh - Materials Today: Proceedings, 2022 - Elsevier
The focus of this research is to design the diaphragm for Micro-electromechanical systems
(MEMS) based pressure sensors. The major goal of this paper is to design and analyze the …

Stress, sensitivity and frequency analysis of the corrugated diaphragm for different corrugation structures

M Farajollahi, M Goharzay, D Borzuei… - Smart Structures and …, 2021 - dbpia.co.kr
Corrugated and flat circular diaphragm-based piezoresistive pressure sensors are designed
and proposed for different applications. Regarding to different criteria including maximum …

[PDF][PDF] Design and analysis of novel MEMS capacitive ttire pressure sensor with high sensitivity and linearity

MN Jelodar, BA Ganji - Majlesi Journal of Telecommunication …, 2016 - mjtd.isfahan.iau.ir
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive
pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm …

[PDF][PDF] Performance analysis of slotted square diaphragm for MEMS pressure sensor

A Nallathambi, T Shanmuganantham - mh, 2015 - pdfs.semanticscholar.org
In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor
for environmental applications was discussed. The main focus of this paper was to design …

[PDF][PDF] Design of high sensitivity and linearity microelectromechanical systems capacitive tire pressure sensor using stepped membrane

JM NOROUZNEJAD, BA Ganji - 2016 - sid.ir
Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire
Pressure Sensor using Stepped Membrane Page 1 IJE TRANSACTIONS C: Aspects Vol. 29 …