This paper presents a micro-electro-mechanical system (MEMS) based electrochemical
vibration sensor for seismic detection. Simulations were conducted to analyze the effect of …

On the heels of the continuous development of electromagnetic and wave technology,
higher requirements have been put forward for the detection of environmental magnetic …

This paper presents the first-of-its-kind electrochemical seismic sensor where, a liquid proof
mass (eg, electrolyte solution) was used as the sensing element to translate environmental …

Electrochemical seismic sensors are key components in monitoring ground vibration, which
are featured with high performances in the low-frequency domain. However, conventional …

This study developed a MEMS-based electrochemical seismometer relying on a cathode–
anode–cathode (CAC) integrated three-electrode structure where two cathodes were …

This paper presents an electrochemical seismic sensor in which paraylene was used as a
substrate and insulating layer of micro-fabricated electrodes, enabling the detection of …

针对深部油气勘探的需要, 研制了基于微机电系统(MEMS) 的宽带电化学地震检波器.
仿真分析了影响该检波器频带的结构参数, 并对其MEMS 实现及封装方法进行了研究 …

This paper presents a micro-electro-mechanical system (MEMS) based electrochemical
seismic sensor where insulating spacers and sensing electrodes were contained in a …

Electrochemical micro-electro mechanical systems (MEMS) seismic sensor is limited by its
nonideality of frequency dependent characteristics hence interface circuits for compensation …

A rotational capacitive micromachined ultrasonic transducer is introduced. Two pressure-
sensitive diaphragms atop vacuum-sealed cavities are mechanically coupled via a rocking …